{"id":5520,"date":"2026-01-08T13:51:27","date_gmt":"2026-01-08T05:51:27","guid":{"rendered":"https:\/\/www.dxfluidics.com\/?p=5520"},"modified":"2026-01-08T13:51:30","modified_gmt":"2026-01-08T05:51:30","slug":"%e6%b0%b4%e5%be%ae%e6%bb%b4-h%e2%82%82o%e2%82%82%e7%94%9f%e6%88%90%e6%9c%ba%e5%88%b6%e5%8f%8a%e5%be%ae%e6%b5%81%e6%8e%a7-%e5%99%a8%e5%ae%98%e8%8a%af%e7%89%87%e6%8a%80%e6%9c%af%e4%bc%98%e5%8c%96","status":"publish","type":"post","link":"https:\/\/www.dxfluidics.com\/en\/technical-support\/information\/5520\/%e6%b0%b4%e5%be%ae%e6%bb%b4-h%e2%82%82o%e2%82%82%e7%94%9f%e6%88%90%e6%9c%ba%e5%88%b6%e5%8f%8a%e5%be%ae%e6%b5%81%e6%8e%a7-%e5%99%a8%e5%ae%98%e8%8a%af%e7%89%87%e6%8a%80%e6%9c%af%e4%bc%98%e5%8c%96\/","title":{"rendered":"\u6c34\u5fae\u6ef4\u4e2d\u8fc7\u6c27\u5316\u6c22\u5f62\u6210\u673a\u5236\u89e3\u6790\u53ca\u5176\u5728\u5fae\u6d41\u63a7\u4e0e\u5668\u5b98\u82af\u7247\u9886\u57df\u7684\u5e94\u7528"},"content":{"rendered":"

1.    \u5f15\u8a00<\/h2>\n\n\n\n

\u5728\u5fae\u6d41\u63a7\u6280\u672f\u98de\u901f\u53d1\u5c55\u7684\u5f53\u4e0b\uff0c\u5fae\u6d41\u63a7\u82af\u7247\u3001PDMS \u82af\u7247\u5236\u5907\u4ee5\u53ca\u5668\u5b98\u82af\u7247\u52a0\u5de5\u7b49\u6280\u672f\u5df2\u5e7f\u6cdb\u6e17\u900f\u5230\u5316\u5b66\u3001\u751f\u7269\u3001\u533b\u7597\u7b49\u591a\u4e2a\u9886\u57df\u3002\u6c34\u5fae\u6ef4\u4f5c\u4e3a\u5fae\u6d41\u63a7\u6db2\u6ef4\u82af\u7247\u7684\u6838\u5fc3\u64cd\u4f5c\u5355\u5143\uff0c\u5176\u5728\u55b7\u96fe\u3001\u51b7\u51dd\u7b49\u8fc7\u7a0b\u4e2d\u7684\u5316\u5b66\u7279\u6027\u5907\u53d7\u5173\u6ce8\u3002\u6b64\u524d\u6709\u7814\u7a76\u63d0\u51fa\uff0c\u6c34\u5fae\u6ef4\u53ef\u5728\u6e29\u548c\u6761\u4ef6\u4e0b\u81ea\u53d1\u5f62\u6210\u8fc7\u6c27\u5316\u6c22\uff08H\u2082O\u2082\uff09\uff0c\u8fd9\u4e00\u73b0\u8c61\u6311\u6218\u4e86\u4f20\u7edf\u7269\u7406\u5316\u5b66\u8ba4\u77e5\uff0c\u4e5f\u5f15\u53d1\u4e86\u5fae\u6d41\u63a7\u884c\u4e1a\u5bf9\u6db2\u6ef4\u64cd\u63a7\u5b89\u5168\u6027\u4e0e\u53cd\u5e94\u53ef\u63a7\u6027\u7684\u8ba8\u8bba\u3002\u6765\u81ea\u6c99\u7279\u963f\u535c\u675c\u62c9\u56fd\u738b\u79d1\u6280\u5927\u5b66\u7684\u7814\u7a76\u56e2\u961f\u901a\u8fc7\u7cfb\u7edf\u5b9e\u9a8c\uff0c\u63ed\u793a\u4e86\u6c34\u5fae\u6ef4\u4e2d H\u2082O\u2082\u7684\u5f62\u6210\u673a\u5236\uff0c\u4e3a\u5fae\u6d41\u63a7\u82af\u7247\u5b9a\u5236\u3001MEMS \u52a0\u5de5\u4ee5\u53ca\u5668\u5b98\u82af\u7247\u57f9\u517b\u7b49\u5e94\u7528\u63d0\u4f9b\u4e86\u5173\u952e\u7406\u8bba\u652f\u6491\u3002<\/p>\n\n\n

\n
\"\"<\/figure>\n<\/div>\n\n\n

\u56fe1 \u5b9e\u9a8c\u88c5\u7f6e\u793a\u610f\u56fe\u5c55\u793a\u4e86\\(H_{2} O_{2}\\)\u5728\u6c34\u6027\u55b7\u96fe\u4e2d\u7684\u84b8\u53d1\u6d53\u7f29\u8fc7\u7a0b\u3002\u8be5\u55b7\u96fe\u88c5\u7f6e\u7531\u4e24\u4e2a\u540c\u8f74\u4e0d\u9508\u94a2\u6bdb\u7ec6\u7ba1\u7ec4\u6210\uff0c\u6db2\u4f53\u5728\u5185\u7ba1\u4e2d\u6d41\u52a8\uff0c\u800c\u6c2e\u6c14\u5219\u5728\u5916\u73af\u9699\u4e2d\u6d41\u52a8\uff08\u53c2\u89c1\u56feS2\u2020\u4e2d\u76843D\u8bbe\u8ba1\u548c\u7167\u7247\uff09\u3002\u8d85\u7eaf\u6c34\u6837\u54c1\u6216\u6dfb\u52a0\u4e86\\(H_{2} O_{2}\\)\u7684\u6c34\u6eb6\u6db2\u901a\u8fc7\u6ce8\u5c04\u6cf5\u6ce8\u5165\uff0c\u6c2e\u6c14\u7531\u9ad8\u538b\u94a2\u74f6\u63d0\u4f9b\u3002\u55b7\u96fe\u5f62\u6210\u7684\u5fae\u6ef4\u88ab\u6536\u96c6\u5728\u5e72\u51c0\u7684\u73bb\u7483\u70e7\u74f6\u4e2d\uff0c\u76f4\u5230\u6536\u96c6\u5230\u8db3\u591f\u4f53\u79ef\u7684\u5206\u6790\u7269\uff08\u4f8b\u5982\uff0c\u6211\u4eec\u7684HPAK\u5206\u6790\u9700\u8981\\(\u2265400 \\mu L\\)\u5206\u6790\u726930\uff09\u3002\u6211\u4eec\u5c06\u84b8\u53d1\u6bd4\u5b9a\u4e49\u4e3a\\(Vo\/V\\)\uff0c\u5176\u4e2d\uff0c\\(V_{0}\\)\u662f\u7528\u4e8e\u4ea7\u751f\u55b7\u96fe\u7684\u6ce8\u5165\u6db2\u4f53\u4f53\u79ef\uff0c\\(V_{F}\\)\u662f\u6536\u96c6\u5230\u7684\u6837\u54c1\u4f53\u79ef\u3002\u8bf7\u6ce8\u610f\uff0c\u5668\u58c1\u4e0a\u7684\u6db2\u6ef4\u4ee5\u53ca\u6536\u96c6\u5728\u6536\u96c6\u70e7\u74f6\u5e95\u90e8\u7684\u5206\u6790\u7269\u4e5f\u4f1a\u5bf9\u84b8\u53d1\u6bd4\u4ea7\u751f\u5f71\u54cd\u3002<\/p>\n\n\n\n

2.    \u5b9e\u9a8c\u6838\u5fc3\u53d1\u73b0<\/h2>\n\n\n\n

1)    \u81ed\u6c27\u662f H\u2082O\u2082\u5f62\u6210\u7684\u51b3\u5b9a\u6027\u56e0\u7d20<\/h3>\n\n\n\n

\u7814\u7a76\u56e2\u961f\u901a\u8fc7\u624b\u5957\u7bb1\u63a7\u5236\u5b9e\u9a8c\u8bc1\u5b9e\uff0c\u6c34\u5fae\u6ef4\u4e2d H\u2082O\u2082\u7684\u5f62\u6210\u4e0e\u7a7a\u6c14\u4e2d\u7684\u81ed\u6c27\uff08O\u2083\uff09\u6d53\u5ea6\u9ad8\u5ea6\u76f8\u5173\u3002\u5728\u65e0\u81ed\u6c27\u73af\u5883\u4e2d\uff08\u68c0\u6d4b\u9650\u2265250 nM\uff09\uff0c\u65e0\u8bba\u662f\u55b7\u96fe\u8fd8\u662f\u51b7\u51dd\u4ea7\u751f\u7684\u6c34\u5fae\u6ef4\uff0c\u5747\u672a\u68c0\u6d4b\u5230 H\u2082O\u2082\uff1b\u800c\u5f53\u81ed\u6c27\u6d53\u5ea6\u5904\u4e8e 10-100 ppb\uff08\u5927\u6c14\u73af\u5883\u76f8\u5173\u6d53\u5ea6\uff09\u65f6\uff0c\u6c34\u5fae\u6ef4\u4e2d\u4f1a\u5f62\u6210 2-30 \u03bcM \u7684 H\u2082O\u2082\uff0c\u4e14\u6d53\u5ea6\u968f\u6c14\u6db2\u8868\u9762\u79ef\u3001\u6df7\u5408\u7a0b\u5ea6\u53ca\u63a5\u89e6\u65f6\u95f4\u7684\u589e\u52a0\u800c\u5347\u9ad8\u3002\u8fd9\u4e00\u53d1\u73b0\u63a8\u7ffb\u4e86 \u201c\u7a7a\u6c14 – \u6c34\u754c\u9762\u5b58\u5728\u8d85\u9ad8\u7535\u573a\u5bfc\u81f4\u6c34\u5206\u5b50\u5171\u4ef7\u952e\u65ad\u88c2\u201d \u7684\u4f20\u7edf\u5047\u8bf4\uff0c\u660e\u786e\u4e86\u81ed\u6c27\u5728\u53cd\u5e94\u4e2d\u7684\u6838\u5fc3\u4f5c\u7528\u3002<\/p>\n\n\n\n

2)    \u7a7a\u6c14 – \u6c34\u754c\u9762\u65e0\u81ea\u53d1\u751f\u6210\u80fd\u529b<\/h3>\n\n\n\n

\u5b9e\u9a8c\u8868\u660e\uff0c\u7a7a\u6c14 – \u6c34\u754c\u9762\u5e76\u975e H\u2082O\u2082\u7684\u81ea\u53d1\u751f\u6210\u6e90\uff0c\u5176\u4e3b\u8981\u529f\u80fd\u662f\u4fc3\u8fdb\u81ed\u6c27\u7684\u4f20\u8d28\u8fc7\u7a0b\u3002\u5728\u5fae\u6d41\u63a7\u82af\u7247\u52a0\u5de5\u4e2d\uff0c\u6db2\u6ef4\u7684\u5206\u6563\u5ea6\uff08\u5982\u5fae\u6d41\u63a7\u6db2\u6ef4\u82af\u7247\u4e2d\u7684\u5fae\u6ef4\u5c3a\u5bf8\u63a7\u5236\uff09\u4f1a\u5f71\u54cd\u6c14\u6db2\u63a5\u89e6\u9762\u79ef\uff0c\u8fdb\u800c\u8c03\u63a7 H\u2082O\u2082\u7684\u751f\u6210\u6548\u7387\u3002\u8fd9\u4e00\u7ed3\u8bba\u5bf9 PDMS \u82af\u7247\u52a0\u5de5\u5e73\u53f0\u7684\u8bbe\u8ba1\u5177\u6709\u91cd\u8981\u610f\u4e49\uff0c\u5c24\u5176\u5728\u9700\u8981\u7cbe\u51c6\u63a7\u5236\u6db2\u6ef4\u53cd\u5e94\u73af\u5883\u7684\u573a\u666f\u4e2d\u3002<\/p>\n\n\n\n

3)    \u84b8\u53d1\u6d53\u7f29\u4e0e\u51b2\u51fb\u6ce2\u7684\u6b21\u8981\u4f5c\u7528<\/h3>\n\n\n
\n
\"\"<\/figure>\n<\/div>\n\n\n

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\u7814\u7a76\u56e2\u961f\u8fd8\u63a2\u7a76\u4e86\u84b8\u53d1\u6d53\u7f29\u548c\u51b2\u51fb\u6ce2\u5bf9 H\u2082O\u2082\u5f62\u6210\u7684\u5f71\u54cd\u3002\u7ed3\u679c\u663e\u793a\uff0c\u84b8\u53d1\u6d53\u7f29\u867d\u80fd\u8f7b\u5fae\u63d0\u5347 H\u2082O\u2082\u6d53\u5ea6\uff08\u56e0 H\u2082O\u2082\u6cb8\u70b9\u9ad8\u4e8e\u6c34\uff09\uff0c\u4f46\u63d0\u5347\u5e45\u5ea6\u4e0d\u8db3 100 \u500d\uff0c\u65e0\u6cd5\u89e3\u91ca ppm \u7ea7 H\u2082O\u2082\u7684\u751f\u6210\uff1b\u800c\u6c14\u52a8\u55b7\u96fe\u8fc7\u7a0b\u4e2d\u4ea7\u751f\u7684\u51b2\u51fb\u6ce2\u4e0e\u5c40\u90e8\u9ad8\u6e29\uff08\u7ea6 327\u2103\u30017 bar\uff09\uff0c\u56e0\u5f3a\u5ea6\u548c\u6301\u7eed\u65f6\u95f4\u4e0d\u8db3\uff0c\u4e5f\u96be\u4ee5\u5f15\u53d1\u6709\u6548\u5316\u5b66\u53cd\u5e94\u3002\u8fd9\u4e00\u7ed3\u8bba\u4e3a MEMS \u52a0\u5de5\u4e2d\u6c14\u52a8\u55b7\u96fe\u6280\u672f\u7684\u5b89\u5168\u5e94\u7528\u63d0\u4f9b\u4e86\u7406\u8bba\u4f9d\u636e\u3002<\/p>\n\n\n\n

3.    \u5173\u952e\u5f71\u54cd\u56e0\u7d20\u6df1\u5ea6\u89e3\u6790<\/h2>\n\n\n\n

1)    \u81ed\u6c27\u6d53\u5ea6\u4e0e\u6c14\u6db2\u76f8\u4e92\u4f5c\u7528<\/h3>\n\n\n\n

\u81ed\u6c27\u5728\u6c34\u4e2d\u7684\u6eb6\u89e3\u5ea6\u8f83\u4f4e\uff08\u4ea8\u5229\u5b9a\u5f8b\u5e38\u6570\u7ea6 10\u207b\u00b3 M atm\u207b\u00b9\uff09\uff0c\u4f46\u6c34\u5fae\u6ef4\u7684\u9ad8\u6bd4\u8868\u9762\u79ef\uff08\u5982 1 mL \u6c34\u5206\u6563\u4e3a 10 \u03bcm \u5fae\u6ef4\u65f6\uff0c\u8868\u9762\u79ef\u63d0\u5347 1240 \u500d\uff09\u663e\u8457\u4fc3\u8fdb\u4e86\u81ed\u6c27\u7684\u4f20\u8d28\u6548\u7387\u3002\u5728\u5fae\u6d41\u63a7\u82af\u7247\u7684\u8bbe\u8ba1\u4e2d\uff0c\u901a\u8fc7\u4f18\u5316\u6db2\u6ef4\u5c3a\u5bf8\u3001\u6c14\u4f53\u6d41\u901f\u7b49\u53c2\u6570\uff08\u5982 MEMS \u52a0\u5de5\u4e2d\u7684\u6c14\u8def\u63a7\u5236\uff09\uff0c\u53ef\u7cbe\u51c6\u8c03\u63a7\u81ed\u6c27\u4e0e\u6c34\u5fae\u6ef4\u7684\u76f8\u4e92\u4f5c\u7528\u3002\u4f8b\u5982\uff0c\u5728\u5668\u5b98\u82af\u7247\u52a0\u5de5\u5e73\u53f0\u4e2d\uff0c\u63a7\u5236\u73af\u5883\u81ed\u6c27\u6d53\u5ea6\u80fd\u907f\u514d H\u2082O\u2082\u8fc7\u5ea6\u751f\u6210\u5bf9\u7ec6\u80de\u57f9\u517b\u7684\u5e72\u6270\u3002<\/p>\n\n\n\n

2)    \u5fae\u6d41\u63a7\u7cfb\u7edf\u4e2d\u7684\u53c2\u6570\u8c03\u63a7<\/h3>\n\n\n
\n
\"\"<\/figure>\n<\/div>\n\n\n

\u56fe3\uff08A\uff09\u4e00\u7ec4\u5177\u6709\u4ee3\u8868\u6027\u7684\u89c6\u9891\u56fe\u50cf\u5e8f\u5217\uff0c\u5c55\u793a\u4e86\u540c\u5fc3\u9ad8\u901f\u5916\u90e8\u6c2e\u6c14\uff08\\((5.3 L min^{-1} )\\)\uff09\u4e0e\u901f\u5ea6\u8f83\u6162\u7684\u5185\u90e8\u6c34\u5c04\u6d41\uff08\\((100 \\mu L min^{-1})\\)\uff09\u4e4b\u95f4\u7684\u76f8\u4e92\u4f5c\u7528\u3002\u7ea2\u8272\u5706\u5708\u6807\u8bb0\u4e86\u5728\u5feb\u901f\u6d41\u52a8\u7684\u6c2e\u6c14\u52a0\u901f\u4f5c\u7528\u4e0b\u4e24\u4e2a\u6db2\u6ef4\u7684\u78b0\u649e\u548c\u7834\u788e\u60c5\u51b5\u3002\u7c89\u8272\u7bad\u5934\u6307\u793a\u4e86\u4e00\u4e2a\u76f4\u5f84\u4e3a4\u6beb\u7c73\u7684\u6db2\u6ef4\u3002\u8fd9\u4e9b\u56fe\u50cf\u662f\u4f7f\u7528Leica\u957f\u8ddd\u79bb\u663e\u5fae\u955c\uff0c\u901a\u8fc7\u8d85\u9ad8\u901f\u76f8\u673a\uff08Kirana-05M\uff09\u4ee5500\u4e07\u5e27\/\u79d2\u7684\u901f\u5ea6\u91c7\u96c6\u7684\u3002\u6240\u5c55\u793a\u7684\u5e27\u5e8f\u5217\u5bf9\u5e94\u7684\u65f6\u95f4\u76f8\u5bf9\u4e8e\u7b2c\u4e00\u5e27\u5206\u522b\u4e3a\\(t=0\\)\u30011.6\u30012.2\u30013.2\u548c4.2\u6beb\u79d2\u3002\uff08A\uff09\u4e2d\u7684\u6bd4\u4f8b\u5c3a\u4e3a50\u6beb\u7c73\u3002\uff08B\u548cC\uff09\u4e3a\u4e09\u4e2a\u76f8\u90bb\u7684\u76f4\u5f8420\u6beb\u7c73\u6db2\u6ef4\u5468\u56f4\u9ad8\u901f\u6c14\u6d41\u6570\u503c\u6a21\u62df\u5f97\u51fa\u7684\u538b\u529b\u573a\u548c\u6e29\u5ea6\u573a\u9884\u6d4b\u5206\u5e03\u3002<\/p>\n\n\n\n

\u5b9e\u9a8c\u53d1\u73b0\uff0c\u6db2\u4f53\u6d41\u901f\u3001\u6c14\u4f53\u6d41\u901f\u53ca\u82af\u7247\u6750\u8d28\u5747\u4f1a\u5f71\u54cd H\u2082O\u2082\u7684\u751f\u6210\u3002\u5f53\u6db2\u4f53\u6d41\u901f\u4f4e\u4e8e 70 \u03bcL min\u207b\u00b9 \u65f6\uff0c\u84b8\u53d1\u6d53\u7f29\u6548\u5e94\u589e\u5f3a\uff0c\u4f46 H\u2082O\u2082\u6d53\u5ea6\u63d0\u5347\u4ecd\u6709\u9650\uff1b\u800c\u6c2e\u6c14\u526a\u5207\u6c14\u6d41\u901f\u7684\u589e\u52a0\uff081-5 L min\u207b\u00b9\uff09\u4f1a\u901a\u8fc7\u5f3a\u5316\u6df7\u5408\u4f5c\u7528\uff0c\u7ebf\u6027\u63d0\u5347 H\u2082O\u2082\u6d53\u5ea6\u3002\u8fd9\u4e00\u89c4\u5f8b\u5bf9 PDMS \u82af\u7247\u52a0\u5de5\u4e2d\u7684\u6db2\u6ef4\u64cd\u63a7\u53c2\u6570\u4f18\u5316\u5177\u6709\u76f4\u63a5\u6307\u5bfc\u610f\u4e49\uff0c\u5c24\u5176\u5728\u5fae\u6d41\u63a7\u82af\u7247\u5b9a\u5236\u4e2d\u9700\u8981\u5e73\u8861\u6db2\u6ef4\u7a33\u5b9a\u6027\u4e0e\u53cd\u5e94\u53ef\u63a7\u6027\u7684\u573a\u666f\u3002<\/p>\n\n\n\n

3)    \u82af\u7247\u6750\u8d28\u4e0e\u8868\u9762\u4fee\u9970\u7684\u5f71\u54cd<\/h3>\n\n\n\n

\u5728\u51b7\u51dd\u5b9e\u9a8c\u4e2d\uff0c\u758f\u6c34\u4fee\u9970\u7684 SiO\u2082\/Si wafers\uff08\u5982\u7ecf FDTS \u7845\u70f7\u5316\u5904\u7406\u7684\u57fa\u6750\uff09\u4e0e\u8d85\u58f0\u6ce2\u52a0\u6e7f\u5668\u4ea7\u751f\u7684\u6c34\u5fae\u6ef4\uff0c\u5176 H\u2082O\u2082\u751f\u6210\u6548\u7387\u4e0e\u57fa\u6750\u7279\u6027\u76f8\u5173\u3002\u8fd9\u63d0\u793a\u5728 PDMS \u82af\u7247\u5236\u5907\u4e2d\uff0c\u8868\u9762\u4fee\u9970\u6280\u672f\uff08\u5982\u4eb2\u6c34\u4fee\u9970\u3001\u758f\u6c34\u4fee\u9970\uff09\u4e0d\u4ec5\u5f71\u54cd\u6db2\u6ef4\u9644\u7740\u4e0e\u6d41\u52a8\uff0c\u8fd8\u53ef\u80fd\u901a\u8fc7\u6539\u53d8\u81ed\u6c27\u5438\u9644\u6548\u7387\u95f4\u63a5\u8c03\u63a7 H\u2082O\u2082\u751f\u6210\uff0c\u4e3a\u5fae\u6d41\u63a7\u82af\u7247\u7684\u8868\u9762\u529f\u80fd\u5316\u8bbe\u8ba1\u63d0\u4f9b\u4e86\u65b0\u8003\u91cf\u3002<\/p>\n\n\n

\n
\"\"<\/figure>\n<\/div>\n\n\n

\u56fe4  \u5728\u5177\u6709\u53d7\u63a7\u6c14\u4f53\u6210\u5206\u7684\u624b\u5957\u7bb1\u5185\u8fdb\u884c\u55b7\u96fe\u548c\u51b7\u51dd\u5b9e\u9a8c\u7684\u88c5\u7f6e\u793a\u610f\u56fe\u3002\u81ed\u6c27\u6c14\u4f53\u5728\u5916\u90e8\u4ea7\u751f\uff0c\u5e76\u5728\u8fdb\u5165\u624b\u5957\u7bb1\u524d\u7528\\(N_{2}\\)\u6c14\u4f53\u548c\u7a7a\u6c14\u7a00\u91ca\uff0c\u5176\u6d53\u5ea6\u901a\u8fc7\u81ed\u6c27\u8ba1\u76d1\u6d4b\uff0c\u8be5\u81ed\u6c27\u8ba1\u7684\u68c0\u6d4b\u9650\u4e3a2 ppb\u3002\u5de6\u4fa7\u5c55\u793a\u4e86\u55b7\u96fe\u7684\u5f62\u6210\uff0c\u53f3\u4fa7\u5c55\u793a\u4e86\u6c34\u84b8\u6c14\u5728\u758f\u6c34\u57fa\u5e95\u4e0a\u7684\u51b7\u51dd\u3002<\/p>\n\n\n\n

4.    \u6280\u672f\u5173\u8054\u4e0e\u884c\u4e1a\u5b9e\u8df5\u5e94\u7528<\/h2>\n\n\n\n

1)    \u5fae\u6d41\u63a7\u82af\u7247\u5b9a\u5236\u4e0e\u52a0\u5de5\u4f18\u5316<\/h3>\n\n\n\n

\u8be5\u7814\u7a76\u4e3a\u5fae\u6d41\u63a7\u82af\u7247\u7684\u8bbe\u8ba1\u4e0e\u52a0\u5de5\u63d0\u4f9b\u4e86\u5173\u952e\u4f18\u5316\u65b9\u5411\u3002\u5728 PDMS \u82af\u7247\u52a0\u5de5\u5e73\u53f0\u4e2d\uff0c\u9700\u91cd\u89c6\u73af\u5883\u6c14\u4f53\u6210\u5206\u7684\u63a7\u5236\uff0c\u5c24\u5176\u5728\u751f\u7269\u68c0\u6d4b\u3001\u7ec6\u80de\u57f9\u517b\u7c7b\u5fae\u6d41\u63a7\u82af\u7247\uff08\u5982\u7ec6\u80de\u57f9\u517b\u5fae\u6d41\u63a7\u82af\u7247\u3001\u7c7b\u5668\u5b98\u5fae\u6d41\u63a7\u82af\u7247\uff09\u4e2d\uff0c\u5e94\u907f\u514d\u81ed\u6c27\u79ef\u7d2f\u5bfc\u81f4 H\u2082O\u2082\u751f\u6210\u5bf9\u751f\u7269\u6d3b\u6027\u7269\u8d28\u7684\u635f\u4f24\u3002\u540c\u65f6\uff0cMEMS \u4ee3\u5de5\u670d\u52a1\u4e2d\u53ef\u901a\u8fc7\u8c03\u6574\u55b7\u96fe\u53c2\u6570\uff08\u5982\u6db2\u4f53\u6d41\u901f\u3001\u6c14\u4f53\u538b\u529b\uff09\uff0c\u5b9e\u73b0\u5bf9\u6db2\u6ef4\u53cd\u5e94\u73af\u5883\u7684\u7cbe\u51c6\u8c03\u63a7\u3002<\/p>\n\n\n\n

2)    \u5668\u5b98\u82af\u7247\u4e0e\u7ec6\u80de\u57f9\u517b\u7684\u73af\u5883\u63a7\u5236<\/h3>\n\n\n\n

\u5668\u5b98\u82af\u7247\u4f5c\u4e3a\u5fae\u6d41\u63a7\u6280\u672f\u7684\u9ad8\u7aef\u5e94\u7528\uff0c\u5bf9\u57f9\u517b\u73af\u5883\u7684\u7eaf\u5ea6\u8981\u6c42\u6781\u9ad8\u3002\u7814\u7a76\u53d1\u73b0\uff0c\u7a7a\u6c14\u4e2d\u7684\u81ed\u6c27\u6d53\u5ea6\uff08\u5982\u52a0\u5dde\u5730\u533a\u5e73\u5747 26 ppb\uff0c\u6700\u9ad8\u8d85 80 ppb\uff09\u662f\u5bfc\u81f4\u6c34\u5fae\u6ef4\u4e2d H\u2082O\u2082\u751f\u6210\u7684\u4e3b\u8981\u8bf1\u56e0\u3002\u56e0\u6b64\uff0c\u5728\u5668\u5b98\u82af\u7247\u57f9\u517b\u89e3\u51b3\u65b9\u6848\u4e2d\uff0c\u9700\u96c6\u6210\u81ed\u6c27\u8fc7\u6ee4\u88c5\u7f6e\uff0c\u5c24\u5176\u5728\u809d\u5668\u5b98\u82af\u7247\u3001\u80ba\u5668\u5b98\u82af\u7247\u7b49\u5bf9\u6c27\u5316\u5e94\u6fc0\u654f\u611f\u7684\u6a21\u578b\u4e2d\uff0c\u53ef\u6709\u6548\u63d0\u5347\u57f9\u517b\u4f53\u7cfb\u7684\u7a33\u5b9a\u6027\u3002<\/p>\n\n\n\n

3)    PDMS \u6a21\u5177\u4e0e\u82af\u7247\u5236\u5907\u7684\u8d28\u91cf\u63a7\u5236<\/h3>\n\n\n\n

PDMS \u82af\u7247\u6a21\u5177\u5236\u5907\u4e2d\uff0c\u8d85\u58f0\u6ce2\u52a0\u6e7f\u5668\u7684\u4f7f\u7528\u53ef\u80fd\u5bfc\u81f4 H\u2082O\u2082\u6b8b\u7559\uff0c\u8fdb\u800c\u5f71\u54cd\u82af\u7247\u6750\u8d28\u7684\u7a33\u5b9a\u6027\u3002\u7814\u7a76\u5efa\u8bae\u5728 PDMS \u6a21\u5177\u52a0\u5de5\u8bbe\u5907\u4e2d\u589e\u52a0\u6c14\u4f53\u51c0\u5316\u6a21\u5757\uff0c\u540c\u65f6\u4f18\u5316\u56fa\u5316\u5de5\u827a\uff08\u5982\u70d8\u7bb1\u6e29\u5ea6\u3001\u65f6\u95f4\uff09\uff0c\u907f\u514d H\u2082O\u2082\u5bf9 PDMS \u6750\u6599\u6027\u80fd\u7684\u5e72\u6270\u3002\u8fd9\u4e00\u4f18\u5316\u65b9\u6848\u53ef\u63d0\u5347 PDMS \u82af\u7247\u7684\u6279\u6b21\u4e00\u81f4\u6027\uff0c\u5bf9\u5fae\u6d41\u63a7\u82af\u7247\u5236\u9020\u5546\u7684\u751f\u4ea7\u6d41\u7a0b\u6539\u8fdb\u5177\u6709\u5b9e\u9645\u4ef7\u503c\u3002<\/p>\n\n\n\n

4)    MEMS \u52a0\u5de5\u4e0e\u5fae\u7eb3\u5236\u9020\u7684\u62d3\u5c55<\/h3>\n\n\n\n

\u5728 MEMS \u5fae\u7eb3\u52a0\u5de5\u4e2d\uff0c\u6c14\u52a8\u55b7\u96fe\u6280\u672f\u5e7f\u6cdb\u5e94\u7528\u4e8e\u8584\u819c\u6c89\u79ef\u3001\u8868\u9762\u6539\u6027\u7b49\u5de5\u827a\u3002\u8be5\u7814\u7a76\u660e\u786e\u4e86\u55b7\u96fe\u8fc7\u7a0b\u4e2d H\u2082O\u2082\u7684\u751f\u6210\u673a\u5236\uff0c\u4e3a\u5de5\u827a\u53c2\u6570\u4f18\u5316\u63d0\u4f9b\u4e86\u4f9d\u636e\u3002\u4f8b\u5982\uff0c\u5728\u7535\u5b50\u675f\u5149\u523b\u52a0\u5de5\u4e2d\uff0c\u63a7\u5236\u73af\u5883\u81ed\u6c27\u6d53\u5ea6\u53ef\u907f\u514d H\u2082O\u2082\u5bf9\u5149\u523b\u80f6\u6027\u80fd\u7684\u5f71\u54cd\uff1b\u800c\u5728\u6df1\u7845\u523b\u8680\u5de5\u827a\u4e2d\uff0c\u5408\u7406\u8bbe\u8ba1\u6c14\u6db2\u63a5\u89e6\u65b9\u5f0f\u80fd\u51cf\u5c11\u526f\u53cd\u5e94\u4ea7\u7269\u7684\u751f\u6210\u3002<\/p>\n\n\n\n

\u672c\u7814\u7a76\u901a\u8fc7\u7cfb\u7edf\u5b9e\u9a8c\u63ed\u793a\u4e86\u6c34\u5fae\u6ef4\u4e2d\u8fc7\u6c27\u5316\u6c22\u7684\u5f62\u6210\u673a\u5236\uff1a\u81ed\u6c27\u662f\u53cd\u5e94\u7684\u6838\u5fc3\u524d\u63d0\uff0c\u7a7a\u6c14 – \u6c34\u754c\u9762\u901a\u8fc7\u4fc3\u8fdb\u81ed\u6c27\u4f20\u8d28\u52a0\u901f\u53cd\u5e94\uff0c\u800c\u84b8\u53d1\u6d53\u7f29\u4e0e\u51b2\u51fb\u6ce2\u4ec5\u8d77\u5230\u6b21\u8981\u4f5c\u7528\u3002\u8fd9\u4e00\u53d1\u73b0\u4e0d\u4ec5\u4fee\u6b63\u4e86\u4f20\u7edf\u8ba4\u77e5\uff0c\u66f4\u5bf9\u5fae\u6d41\u63a7\u82af\u7247\u5b9a\u5236\u3001PDMS \u82af\u7247\u5236\u5907\u3001MEMS \u52a0\u5de5\u4ee5\u53ca\u5668\u5b98\u82af\u7247\u57f9\u517b\u7b49\u884c\u4e1a\u5e94\u7528\u63d0\u4f9b\u4e86\u5173\u952e\u6307\u5bfc\u3002<\/p>\n\n\n\n

\u5728\u5b9e\u9645\u751f\u4ea7\u4e2d\uff0c\u5fae\u6d41\u63a7\u82af\u7247\u5236\u9020\u5546\u53ef\u901a\u8fc7\u4f18\u5316\u6c14\u6db2\u63a5\u89e6\u8bbe\u8ba1\u3001\u63a7\u5236\u73af\u5883\u81ed\u6c27\u6d53\u5ea6\u3001\u6539\u8fdb\u8868\u9762\u4fee\u9970\u6280\u672f\u7b49\u65b9\u5f0f\uff0c\u5b9e\u73b0\u5bf9 H\u2082O\u2082\u751f\u6210\u7684\u7cbe\u51c6\u8c03\u63a7\uff1b\u5668\u5b98\u82af\u7247\u7814\u53d1\u4e2d\u53ef\u96c6\u6210\u6c14\u4f53\u51c0\u5316\u6a21\u5757\uff0c\u63d0\u5347\u7ec6\u80de\u57f9\u517b\u7684\u7a33\u5b9a\u6027\uff1bMEMS \u4ee3\u5de5\u670d\u52a1\u4e2d\u53ef\u4f9d\u636e\u672c\u7814\u7a76\u7ed3\u8bba\u4f18\u5316\u5de5\u827a\u53c2\u6570\uff0c\u964d\u4f4e\u526f\u53cd\u5e94\u98ce\u9669\u3002\u672a\u6765\uff0c\u968f\u7740\u5fae\u6d41\u63a7\u6280\u672f\u4e0e MEMS \u52a0\u5de5\u7684\u6df1\u5ea6\u878d\u5408\uff0c\u8be5\u673a\u5236\u8fd8\u5c06\u4e3a\u66f4\u591a\u9ad8\u7aef\u5fae\u7eb3\u5668\u4ef6\u7684\u7814\u53d1\u63d0\u4f9b\u7406\u8bba\u652f\u6491\uff0c\u63a8\u52a8\u884c\u4e1a\u5411\u66f4\u7cbe\u51c6\u3001\u66f4\u5b89\u5168\u7684\u65b9\u5411\u53d1\u5c55\u3002<\/p>\n\n\n\n

\u53c2\u8003\u6587\u732e\uff1aDOI: 10.1039\/d1sc06465g<\/p>","protected":false},"excerpt":{"rendered":"

1.    \u5f15\u8a00 \u5728\u5fae\u6d41\u63a7\u6280\u672f\u98de\u901f\u53d1\u5c55\u7684\u5f53\u4e0b\uff0c\u5fae\u6d41\u63a7\u82af\u7247\u3001PDMS \u82af\u7247\u5236\u5907\u4ee5\u53ca […]<\/p>\n","protected":false},"author":2,"featured_media":5521,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_crdt_document":"","footnotes":""},"categories":[5],"tags":[],"class_list":["post-5520","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-information"],"yoast_head":"\n\u6c34\u5fae\u6ef4\u4e2d\u8fc7\u6c27\u5316\u6c22\u5f62\u6210\u673a\u5236\u89e3\u6790\u53ca\u5176\u5728\u5fae\u6d41\u63a7\u4e0e\u5668\u5b98\u82af\u7247\u9886\u57df\u7684\u5e94\u7528 - \u9876\u65ed\u5fae\u63a7<\/title>\n<meta name=\"description\" content=\"\u63ed\u793a\u6c34\u5fae\u6ef4\u4e2d H\u2082O\u2082\u5f62\u6210\u6838\u5fc3\u673a\u5236\uff1a\u81ed\u6c27\u4e3a\u5173\u952e\u56e0\u7d20\uff0c\u7a7a\u6c14 - 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