{"id":3844,"date":"2025-03-11T16:30:00","date_gmt":"2025-03-11T08:30:00","guid":{"rendered":"https:\/\/www.dxfluidics.com\/?p=3844"},"modified":"2025-03-12T08:32:32","modified_gmt":"2025-03-12T00:32:32","slug":"%e5%be%ae%e6%b5%81%e6%8e%a7%e5%be%ae%e6%b3%a2%e7%94%9f%e7%89%a9%e4%bc%a0%e6%84%9f%e5%99%a8","status":"publish","type":"post","link":"https:\/\/www.dxfluidics.com\/en\/technical-support\/information\/3844\/%e5%be%ae%e6%b5%81%e6%8e%a7%e5%be%ae%e6%b3%a2%e7%94%9f%e7%89%a9%e4%bc%a0%e6%84%9f%e5%99%a8\/","title":{"rendered":"\u5fae\u6d41\u63a7\u5fae\u6ce2\u751f\u7269\u4f20\u611f\u5668"},"content":{"rendered":"\n<p class=\"wp-block-paragraph\">\u53c2\u8003\u6587\u732e\uff1a[1]\u738b\u5f66\u96c4,\u9648\u4edf\u9f99,\u5468\u5c0f\u6ee1,\u7b49.\u57fa\u4e8e\u805a\u4e8c\u7532\u57fa\u7845\u6c27\u70f7\u5fae\u6d41\u63a7\u82af\u7247\u7684\u5fae\u6ce2\u751f\u7269\u4f20\u611f\u5668\u7814\u7a76\u8fdb\u5c55[J].\u5206\u6790\u5316\u5b66,2024,52(12):1797-1806.DOI:10.19756\/j.issn.0253-3820.241190.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u5c06<a href=\"https:\/\/www.dxfluidics.com\/technical-information\/information\/3477\/\" data-type=\"post\" data-id=\"3477\">\u5fae\u6d41\u63a7\u6280\u672f<\/a>\u4e0e\u5fae\u6ce2\u751f\u7269\u4f20\u611f\u6280\u672f\u7ed3\u5408\uff0c\u53ef\u4ee5\u589e\u5f3a\u4f20\u611f\u5668\u7684\u7075\u654f\u5ea6\uff0c\u5b9e\u73b0\u5355\u4e2a\u6216\u591a\u4e2a\u6837\u54c1\u7684\u9ad8\u901a\u91cf\u5206\u6790\uff1b<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u5bf9\u6781\u5c11\u91cf\u7684\u6837\u54c1\u4e5f\u80fd\u8fdb\u884c\u6709\u6548\u3001\u4f4e\u6210\u672c\u7684\u5fae\u6ce2\u65e0\u635f\u68c0\u6d4b\u5206\u6790\uff0c\u6709\u671b\u5e94\u7528\u4e8e\u751f\u7269\u6837\u672c\u7684\u4e34\u5e8a\u5feb\u901f\u8bca\u65ad\u6216\u5b9e\u65f6\u68c0\u6d4b\uff1b<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u80fd\u591f\u5728\u5355\u4e00\u5e73\u53f0\u4e0a\u5b9e\u73b0\u4ece\u6837\u54c1\u5904\u7406\u5230\u68c0\u6d4b\u7684\u81ea\u52a8\u5316\uff0c\u6216\u8005\u5728\u540c\u4e00\u5757\u5fae\u6d41\u63a7\u82af\u7247\u4e0a\u96c6\u6210\u591a\u4e2a\u5fae\u6ce2\u4f20\u611f\u5668\uff0c\u5b9e\u73b0\u591a\u79cd\u7269\u7406\u548c\u5316\u5b66\u53c2\u6570\u7684\u5b9e\u65f6\u68c0\u6d4b\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">1.&nbsp;&nbsp;&nbsp; \u751f\u7269\u4f20\u611f\u5668<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u751f\u7269\u4f20\u611f\u5668\u901a\u8fc7\u6362\u80fd\u5668\u5c06\u751f\u7269\u5f85\u6d4b\u6837\u54c1\u7684\u4e0d\u540c\u7279\u5f81\uff08\u5982\u6d53\u5ea6\u3001\u79cd\u7c7b\u548c\u5206\u5b50\u91cf\u7b49\uff09\u8f6c\u6362\u4e3a\u4e0d\u540c\u7c7b\u578b\u7684\u7535\u4fe1\u53f7\uff08\u5982\u7535\u538b\u8109\u51b2\u3001\u9891\u7387\u548c\u963b\u6297\u7b49\uff09\uff0c\u5b9e\u73b0\u76ee\u6807\u68c0\u6d4b\uff0c\u5305\u62ec\u63d0\u4f9b\u5feb\u901f\u4e14\u51c6\u786e\u7684\u75c5\u539f\u5b66\u8bca\u65ad\u3001\u6307\u5bfc\u4e34\u5e8a\u6297\u751f\u7d20\u7684\u5408\u7406\u5e94\u7528\u3001\u5206\u6790\u4eba\u4f53\u5fae\u751f\u7269\u4e4b\u95f4\u7684\u76f8\u4e92\u4f5c\u7528\u673a\u5236\u7b49\u3002<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u5fae\u6ce2\u751f\u7269\u4f20\u611f\u5668\u5229\u7528\u5fae\u6ce2\u5668\u4ef6\u5bf9\u751f\u7269\u6837\u54c1\u6eb6\u6db2\u4ecb\u7535\u5e38\u6570\u53d8\u5316\u7684\u54cd\u5e94\u5b9e\u73b0\u751f\u7269\u4f20\u611f\u529f\u80fd\u3002<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u4e0e\u7535\u5316\u5b66\u548c\u5149\u5b66\u751f\u7269\u4f20\u611f\u5668\u76f8\u6bd4\uff0c\u5fae\u6ce2\u751f\u7269\u4f20\u611f\u5668\u54cd\u5e94\u901f\u5ea6\u5feb\u3001\u975e\u4fb5\u5165\u3001\u53ef\u9760\u6027\u9ad8\u3001\u65e0\u6807\u8bb0\u548c\u6613\u96c6\u6210\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">2.&nbsp;&nbsp;&nbsp; \u57fa\u4e8ePDMS\u5fae\u6d41\u63a7\u82af\u7247\u7684\u5fae\u6ce2\u751f\u7269\u4f20\u611f\u5668<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u5fae\u6ce2\u4f20\u611f\u82af\u7247\u901a\u5e38\u5c06\u91d1\u5c5e\u7ed3\u6784\u8bbe\u8ba1\u3001\u52a0\u8f7d\u5728\u7279\u5b9a\u57fa\u677f\uff08\u5982\u73bb\u7483\u3001\u7845\u3001\u78b3\u5316\u7845\u3001\u7837\u5316\u9553\u548c\u5370\u5237\u7535\u8def\u677f\u7b49\uff09\u4e0a\u4ee5\u5b9e\u73b0\u4f20\u611f\u54cd\u5e94\uff0c\u5176\u4e2d\uff0c\u73bb\u7483\u57fa\u677f\u548c\u7845\u57fa\u677f\u80fd\u591f\u901a\u8fc7<a href=\"https:\/\/www.dxfluidics.com\/main-business\/surface-modification\/2126\/\" data-type=\"post\" data-id=\"2126\">\u7b49\u79bb\u5b50\u8868\u9762\u5904\u7406\u5de5\u827a<\/a>\u548c<a href=\"https:\/\/www.dxfluidics.com\/main-business\/custom-chip\/146\/\" data-type=\"post\" data-id=\"146\">PDMS\u5fae\u6d41\u63a7\u82af\u7247<\/a>\u6280\u672f\u9ad8\u6548\u96c6\u6210\u3002<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u57fa\u4e8ePDMS\u5fae\u6d41\u63a7\u82af\u7247\u7684\u5fae\u6ce2\u751f\u7269\u4f20\u611f\u5668\u6839\u636e\u5fae\u6ce2\u4f20\u611f\u5668\u79cd\u7c7b\u7684\u4e0d\u540c\u53ef\u5206\u4e3a\u4f4e\u6e29\u5171\u70e7\u9676\u74f7\uff08LTCC\uff09\u5f0f\u3001\u592a\u8d6b\u5179\uff08THZ\uff09\u8d85\u6750\u6599\u5f0f\u3001\u7f3a\u9677\u5730\u7ed3\u6784\uff08DGS\uff09\u5f0f\u4ee5\u53ca\u8584\u819c\u5fae\u5e26\u5f0f\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">1)&nbsp;&nbsp;&nbsp; \u4f4e\u6e29\u5171\u70e7\u9676\u74f7\u5f0f<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">LTCC\u662f\u4e00\u79cd\u91c7\u7528\u9676\u74f7\u57fa\u5e95\u548c\u91d1\u5c5e\u5bfc\u4f53\u6750\u6599\u5171\u540c\u70e7\u7ed3\u7684\u5de5\u827a\uff0c\u5176\u4e3b\u8981\u7279\u70b9\u662f\u53ef\u5728\u8f83\u4f4e\u6e29\u5ea6\uff08\u901a\u5e38\u4e3a850~900\u2103)\u4e0b\u8fdb\u884c\u70e7\u7ed3\uff0c\u907f\u514d\u9ad8\u6e29\u5bf9\u6750\u6599\u6216\u5668\u4ef6\u7684\u635f\u5bb3\uff0c\u5177\u6709\u4f18\u826f\u7684\u4ecb\u7535\u6027\u80fd\u548c\u4f4e\u635f\u8017\u7279\u6027\u3002<\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full is-resized\"><img loading=\"lazy\" decoding=\"async\" width=\"400\" height=\"243\" src=\"https:\/\/www.dxfluidics.com\/wp-content\/uploads\/2025\/03\/image-19.png\" alt=\"\" class=\"wp-image-3852\" style=\"width:374px;height:auto\" srcset=\"https:\/\/www.dxfluidics.com\/wp-content\/uploads\/2025\/03\/image-19.png 400w, https:\/\/www.dxfluidics.com\/wp-content\/uploads\/2025\/03\/image-19-18x12.png 18w\" sizes=\"auto, (max-width: 400px) 100vw, 400px\" \/><figcaption class=\"wp-element-caption\">\u8c10\u632f\u5929\u7ebf\u578bLTCC\u5fae\u6d41\u63a7\u751f\u7269\u4f20\u611f\u5668<\/figcaption><\/figure>\n<\/div>\n\n\n<p class=\"wp-block-paragraph\">\u56feA\u662f\u4e00\u79cd\u65b0\u578b\u7684LTCC\u5f0f\u65e0\u7ebf\u5fae\u6d41\u63a7\u751f\u7269\u4f20\u611f\u5668\uff0c\u8be5\u4f20\u611f\u5668\u7531\u5e73\u9762\u87ba\u65cb\u7535\u611f\u548c\u5e73\u884c\u677f\u7535\u5bb9\u7ec4\u6210\uff0c\u5f62\u6210\u8c10\u632f\u5929\u7ebf\u7ed3\u6784\uff0c\u5e76\u4e0e\u96c6\u6210\u5728\u57fa\u677f\u5185\u7684\u5fae\u6d41\u63a7\u901a\u9053\u5171\u540c\u7ec4\u6210\u65e0\u7ebf\u4f20\u611f\u7cfb\u7edf\uff0c\u53ef\u5b9e\u65f6\u68c0\u6d4b\u6709\u673a\u6db2\u4f53\u7684\u4ecb\u7535\u5e38\u6570\u3002<\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full is-resized\"><img loading=\"lazy\" decoding=\"async\" width=\"454\" height=\"243\" src=\"https:\/\/www.dxfluidics.com\/wp-content\/uploads\/2025\/03\/image-18.png\" alt=\"\" class=\"wp-image-3851\" style=\"width:376px;height:auto\" srcset=\"https:\/\/www.dxfluidics.com\/wp-content\/uploads\/2025\/03\/image-18.png 454w, https:\/\/www.dxfluidics.com\/wp-content\/uploads\/2025\/03\/image-18-18x10.png 18w\" sizes=\"auto, (max-width: 454px) 100vw, 454px\" \/><figcaption class=\"wp-element-caption\">\u591a\u9891\u8c10\u632f\u578bLTCC\u5fae\u6d41\u63a7\u751f\u7269\u4f20\u611f\u5668<\/figcaption><\/figure>\n<\/div>\n\n\n<p class=\"wp-block-paragraph\">\u56feB\u662f\u57fa\u4e8e\u5fae\u6ce2\u8c10\u632f\u548c\u5e72\u6d89\u53e0\u52a0\u539f\u7406\uff0c\u8bbe\u8ba1\u51fa\u7684LTCC\u5fae\u6ce2\u5fae\u6d41\u63a7\u4f20\u611f\u5668\uff0c\u5176\u5de5\u4f5c\u9891\u6bb5\u4e3a2.45\u548c5.80GHz\u3002\u5728\u5b8c\u6210\u5f85\u6d4b\u6eb6\u6db2\u4e2d\u591a\u5df4\u80fa\u7684\u7ebf\u6027\u4f20\u611f\u54cd\u5e94\u6d4b\u91cf\u540e\uff0c\u5efa\u7acb\u4e86\u5f85\u6d4b\u6eb6\u6db2\u6d53\u5ea6\u7684\u5fae\u6ce2\u4ecb\u7535\u9884\u6d4b\u6a21\u578b\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">2)&nbsp;&nbsp;&nbsp; \u592a\u8d6b\u5179\u8d85\u6750\u6599\u5f0f<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u8d85\u6750\u6599\u4f5c\u4e3a\u4e00\u79cd\u901a\u8fc7\u4eba\u5de5\u8bbe\u8ba1\u5b9e\u73b0\u7684\u65b0\u578b\u6750\u6599\uff0c\u5c55\u73b0\u51fa\u4e86\u8d85\u8d8a\u4f20\u7edf\u81ea\u7136\u6750\u6599\u7684\u7535\u78c1\u7279\u6027\uff0c\u5982\u8d1f\u6298\u5c04\u7387\u3001\u5f02\u5e38\u9ad8\u7684\u4ecb\u7535\u5e38\u6570\u548c\u78c1\u5bfc\u7387\u7b49\u3002<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">THz\u6ce2\u5bf9\u751f\u7269\u5206\u5b50\uff08\u5982\u6c34\u548c\u86cb\u767d\u8d28\u7b49\uff09\u5177\u6709\u9ad8\u654f\u611f\u6027\uff0c\u5df2\u6210\u4e3a\u751f\u7269\u68c0\u6d4b\u9886\u57df\u7684\u7814\u7a76\u70ed\u70b9\u3002<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u5c06THz\u6ce2\u4f20\u611f\u5668\u4e0e\u8d85\u6750\u6599\u7ed3\u5408\uff0c\u53ef\u4ee5\u901a\u8fc7\u7279\u5b9a\u7684\u7ed3\u6784\u8bbe\u8ba1\u548c\u7535\u78c1\u54cd\u5e94\u7279\u6027\u589e\u5f3a\u4f20\u611f\u5668\u7684\u7279\u5f02\u6027\u548c\u7075\u654f\u5ea6\u3002<\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full is-resized\"><img loading=\"lazy\" decoding=\"async\" width=\"400\" height=\"243\" src=\"https:\/\/www.dxfluidics.com\/wp-content\/uploads\/2025\/03\/image-17.png\" alt=\"\" class=\"wp-image-3850\" style=\"width:380px;height:auto\" srcset=\"https:\/\/www.dxfluidics.com\/wp-content\/uploads\/2025\/03\/image-17.png 400w, https:\/\/www.dxfluidics.com\/wp-content\/uploads\/2025\/03\/image-17-18x12.png 18w\" sizes=\"auto, (max-width: 400px) 100vw, 400px\" \/><figcaption class=\"wp-element-caption\">SRR\u9635\u5217\u578bTHz\u8d85\u6750\u6599\u751f\u7269\u4f20\u611f\u5668<\/figcaption><\/figure>\n<\/div>\n\n\n<p class=\"wp-block-paragraph\">\u56feC\u4e3a\u96c6\u6210\u5fae\u6d41\u63a7\u901a\u9053\u7684THz\u8d85\u6750\u6599\u751f\u7269\u4f20\u611f\u5668\uff0c\u8be5\u4f20\u611f\u5668\u5229\u7528\u53cc\u95f4\u9699\u8d85\u6750\u6599\u7ed3\u6784\u6355\u83b7\u7532\u80ce\u86cb\u767d\uff08AFP\uff09\u548c\u8c37\u6c28\u9170\u80fa\u8f6c\u79fb\u9176\u540c\u5de5\u9176\u2161\uff08GGT-\u2161)\uff0c\u5e76\u901a\u8fc7\u76d1\u6d4b\u8c10\u632f\u9891\u7387\u7684\u504f\u79fb\u8868\u5f81\u4f20\u611f\u54cd\u5e94\u3002<\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full is-resized\"><img loading=\"lazy\" decoding=\"async\" width=\"451\" height=\"243\" src=\"https:\/\/www.dxfluidics.com\/wp-content\/uploads\/2025\/03\/image-16.png\" alt=\"\" class=\"wp-image-3849\" style=\"width:403px;height:auto\" srcset=\"https:\/\/www.dxfluidics.com\/wp-content\/uploads\/2025\/03\/image-16.png 451w, https:\/\/www.dxfluidics.com\/wp-content\/uploads\/2025\/03\/image-16-18x10.png 18w\" sizes=\"auto, (max-width: 451px) 100vw, 451px\" \/><figcaption class=\"wp-element-caption\">\u5341\u5b57\u5f62\u578bTHz\u8d85\u6750\u6599\u751f\u7269\u4f20\u611f\u5668<\/figcaption><\/figure>\n<\/div>\n\n\n<p class=\"wp-block-paragraph\">\u56feD\u662f\u4e00\u79cd\u5341\u5b57\u5f62\u8d85\u6750\u6599\u7ed3\u6784\uff0c\u5728\u76ca\u751f\u83cc\u5b9e\u9a8c\u4e2d\uff0c\u6700\u5927\u8c10\u632f\u504f\u79fb\u53ef\u8fbe\u523089GHz\uff0c\u5e76\u4e14\u57280.025mg\/50\u03bcL\u7684\u4f4e\u6d53\u5ea6\u4e0b\u4ecd\u80fd\u4ea7\u751f0.72GHz\u7684\u504f\u79fb\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">3)&nbsp;&nbsp;&nbsp; \u7f3a\u9677\u5730\u7ed3\u6784\u5f0f<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u5e73\u9762\u5929\u7ebf\u5728\u7a7a\u95f4\u4e2d\u7684\u80fd\u91cf\u8026\u5408\u4f1a\u964d\u4f4e\u5929\u7ebf\u7684\u8f90\u5c04\u6027\u80fd\uff0c\u51cf\u5c11\u7535\u78c1\u901a\u91cf\u4e0e\u88ab\u6d4b\u751f\u7269\u4ecb\u8d28\u4e4b\u95f4\u7684\u76f8\u4e92\u4f5c\u7528\uff0c\u964d\u4f4e\u4f20\u611f\u7075\u654f\u5ea6\u3002<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u901a\u8fc7\u5728\u5fae\u5e26\u7ebf\u63a5\u5730\u91d1\u5c5e\u677f\u4e0a\u8680\u523b\u7279\u5b9a\u7684\u6805\u683c\u7ed3\u6784\uff0c\u96c6\u4e2d\u91d1\u5c5e\u5bfc\u4f53\u7684\u8868\u9762\u7535\u6d41\uff0c\u6539\u53d8\u4f20\u8f93\u7ebf\u7684\u5206\u5e03\u7535\u611f\u548c\u5206\u5e03\u7535\u5bb9\uff0c\u6291\u5236\u5e73\u9762\u5929\u7ebf\u7684\u80fd\u91cf\u8026\u5408\uff0c\u51cf\u5c11\u8f90\u5c04\u635f\u8017\u5e76\u6539\u5584\u5fae\u6ce2\u8c10\u632f\u7279\u6027\u3002<\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full is-resized\"><img loading=\"lazy\" decoding=\"async\" width=\"458\" height=\"285\" src=\"https:\/\/www.dxfluidics.com\/wp-content\/uploads\/2025\/03\/image-15.png\" alt=\"\" class=\"wp-image-3848\" style=\"width:384px;height:auto\" srcset=\"https:\/\/www.dxfluidics.com\/wp-content\/uploads\/2025\/03\/image-15.png 458w, https:\/\/www.dxfluidics.com\/wp-content\/uploads\/2025\/03\/image-15-18x12.png 18w\" sizes=\"auto, (max-width: 458px) 100vw, 458px\" \/><figcaption class=\"wp-element-caption\">\u5fae\u5e26\u8d34\u7247\u578b\u5fae\u6d41\u63a7\u751f\u7269\u4f20\u611f\u5668<\/figcaption><\/figure>\n<\/div>\n\n\n<p class=\"wp-block-paragraph\">\u56feA\u662f\u4e00\u79cd\u4e0e\u4eff\u751f\u5fae\u6d41\u63a7\u901a\u9053\u96c6\u6210\u7684\u5fae\u5e26\u8d34\u7247\u5929\u7ebf\uff0c\u91c7\u7528DGS\u5f71\u54cd\u63a5\u5730\u91d1\u5c5e\u9762\u4e2d\u7684\u7535\u6d41\u5206\u5e03\uff0c\u589e\u52a0\u7535\u611f\uff1b<\/p>\n\n\n\n<p 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